Introduction to microlithography - theory, materials, and processing : based on a workshop sponsored by the ACS division of organic coatings and plastics chemistry at the 185th meeting of the American chemical society, Seattle, Washington, March 20-25, 1983
- Författare
- (L.F.Thompson, ed. ..)
- Genre
- Konferenspublikation, Bibliografi
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| 1983 | USA, Washington, D.C | 363 sidor. diagr., ill., tab. |